Lobster200Z300S-T0X5-C Wafer Robot
Lobster series 200Z300S-T0X5 wafer handling robot is a single-armed wafer transfer robot with a rate payload of 0.5kg. It has extremely high accuracy, flexibility and safety.
Features of Lobster200Z300S-T0X5-C Wafer Robot
Single-armed;
Payload is 0.5kg;
3-degrees-of-freedom;
Repositioning accuracy reaches ±0.1mm;
Cleanliness reaches Class100.
ROBOTPHOENIX, as an excellent robot manufacturing companies, offers a wide range of industrial robotsfor you to choose from.
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