四氟化碳气体

Purity Grade 99.999%

Formula CF4

Application

Tetrafluoromethane is sometimes used as a low temperature refrigerant. It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.

Alternative Name Carbon tetrafluoride, Perfluoromethane, Tetrafluorocarbon, Freon 14, Halon 14, Arcton 0, CFC 14, PFC 14, R 14,UN 1982

Molecular Weight 88.0043g/ mol

CAS No. 75-73-0

Package 44L 49L
 



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