Piezo Nanopositioning Stage, Linear Piezo Stage with High Accuracy Positioning Accuracy for Nanopositioning

Models

Suffix S-Closed loop
Suffix K-Open loop

P79.Z100S

P79.Z100K

P79.Z200S

P79.Z200K

Units

Active axis

Z

Z

Travel range(0~120V)

80

150

μm±20%

Travel range(0~150V)

100

187.5

μm±20%

Sensor type

SGS/-

SGS/-

Aperture size

128.5×86.5

128.5×86.5

mm

Resolution

7/3

8/5

nm

Linearity

0.1/-

0.15/-

%F.S

Repeatability

0.05/-

0.1/-

%F.S

Picth/yaw/roll

<15

<20

μrad

Push/pull force

30/15

42/18

N

Stiffness in motion direction

0.3

0.2

N/μm±20%

Unloaded resonant frequency

200

150

Hz±20%

Unloaded step time

15/3.2

25/5

ms±20%

Closed-loop unloaded operating frequency

10% travel

50

25

Hz±20%

100% travel

15

5

Load capacity

2

1.5

kg

El.capacitance

5.4

11

μF±20%

Material

Steel, Al

Steel, Al

Mass

700

800

g±5%