Fused Silica/Quartz Substrate
Our company specialize in fabricating series of glass materials, including fused quartz, synthetic quartz, borosilicate glass, sodium calcium glass, low expansion glass, low alkali glass, etc., covering infrared, visible light, ultraviolet multiple bands, can be processed into excellent optical window material, base plate, etc.
材料牌号 Material Brand
|
肖 特 |
Borofloat33 / BK7 / B270 / D263 etc. |
|
康 宁 |
Eagle XG , Fused Silica 7980 / 7978 / 7979 etc. |
|
菲利华 |
Fused Silica JGS1 / JGS2 & Single quartz etc. |
|
小 原 |
SK-1300 |
|
光 明 |
H-K9L / Soda Lime etc. |
加工能力Processing Capacity
|
Specification规格 |
unit |
3” |
4” |
5" |
6" |
8" |
12" |
|
Diameter (or Square)直径或方片 |
mm |
100 |
125 |
150 |
200 |
300 |
|
|
Tol(±)公差 |
mm |
<0.1~0.25 mm |
|||||
|
ThinnestThickness最小厚度 |
mm |
>0.10 |
>0.18 |
>0.30 |
>0.30 |
>0.30 |
>0.50 |
|
Primary Flat主平台 |
mm |
22 |
notch |
notch |
|||
|
LTV (5mmx5mm) |
µm |
<2 |
<2 |
<2 |
<2 |
<2 |
<10 |
|
TTV |
µm |
<8 |
<10 |
<15 |
<20 |
<30 |
<30 |
|
Bow |
µm |
±20 |
±25 |
±40 |
±40 |
±60 |
±60 |
|
Warp |
µm |
<30 |
<40 |
<50 |
<50 |
<60 |
<60 |
|
PLTV(<0.5um) |
% |
≥95%(5mm*5mm) |
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|
Transmittance透过范围 |
UV, Optical, IR or Custom option紫外、可见光、红外 |
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|
Edge Rounding边缘 |
mm |
Compliant with SEMI M1.2 Standard/refer to IEC62276 |
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|
Surface Type表面处理 |
Single Side Polished /Double Sides Polished单面抛光/双面抛光 |
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|
Polished side Ra抛光面 |
nm |
||||||
|
Back Side Criteria反面 |
µm |
General is 0.2-0.5µm or as customized |
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|
Appearance外观 |
Contamination污染 |
None |
|||||
|
Particles微粒 >0.3µm |
<=30 |
||||||
|
Saw Marks, striations锯痕，条纹 |
None |
||||||
|
Scratch划痕 |
None |
||||||
|
Cracks, crowsfeel saw marks, stains裂纹 |
None |
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