.

Fused Silica/Quartz Substrate

Our company specialize in fabricating series of glass materials, including fused quartz, synthetic quartz, borosilicate glass, sodium calcium glass, low expansion glass, low alkali glass, etc., covering infrared, visible light, ultraviolet multiple bands, can be processed into excellent optical window material, base plate, etc.

材料牌号 Material Brand

肖 特

Borofloat33 / BK7 / B270 / D263 etc.

康 宁

Eagle XG , Fused Silica 7980 / 7978 / 7979 etc.

菲利华

Fused Silica JGS1 / JGS2 & Single quartz etc.

小 原

SK-1300

光 明

H-K9L / Soda Lime etc.

加工能力Processing Capacity

Specification规格

unit

3”

4”

5"

6"

8"

12"

Diameter (or Square)直径或方片

mm

100

125

150

200

300

Tol(±)公差

mm

<0.1~0.25 mm

ThinnestThickness最小厚度

mm

>0.10

>0.18

>0.30

>0.30

>0.30

>0.50

Primary Flat主平台

mm

22

notch

notch

LTV (5mmx5mm)

µm

<2

<2

<2

<2

<2

<10

TTV

µm

<8

<10

<15

<20

<30

<30

Bow

µm

±20

±25

±40

±40

±60

±60

Warp

µm

<30

<40

<50

<50

<60

<60

PLTV(<0.5um)

%

≥95%(5mm*5mm)

Transmittance透过范围

UV, Optical, IR or Custom option紫外、可见光、红外

Edge Rounding边缘

mm

Compliant with SEMI M1.2 Standard/refer to IEC62276

Surface Type表面处理

Single Side Polished /Double Sides Polished单面抛光/双面抛光

Polished side Ra抛光面

nm

Back Side Criteria反面

µm

General is 0.2-0.5µm or as customized

Appearance外观

Contamination污染

None

Particles微粒 >0.3µm

<=30

Saw Marks, striations锯痕,条纹

None

Scratch划痕

None

Cracks, crowsfeel saw marks, stains裂纹

None



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