合成石英/熔融石英基片

肖 特

Borofloat33 / BK7 / B270 / D263 etc.

康 宁

Eagle XG , Fused Silica 7980 / 7978 / 7979 etc.

菲利华

Fused Silica JGS1 / JGS2 & Single quartz etc.

小 原

SK-1300

光 明

H-K9L / Soda Lime etc.

Specification规格

unit

3”

4”

5"

6"

8"

12"

Diameter (or Square)直径或方片

mm

100

125

150

200

300

Tol(±)公差

mm

<0.1~0.25 mm

ThinnestThickness最小厚度

mm

>0.10

>0.18

>0.30

>0.30

>0.30

>0.50

Primary Flat主平台

mm

22

notch

notch

LTV (5mmx5mm)

µm

<2

<2

<2

<2

<2

<10

TTV

µm

<8

<10

<15

<20

<30

<30

Bow

µm

±20

±25

±40

±40

±60

±60

Warp

µm

<30

<40

<50

<50

<60

<60

PLTV(<0.5um)

%

≥95%(5mm*5mm)

Transmittance透过范围

UV, Optical, IR or Custom option紫外、可见光、红外

Edge Rounding边缘

mm

Compliant with SEMI M1.2 Standard/refer to IEC62276

Surface Type表面处理

Single Side Polished /Double Sides Polished单面抛光/双面抛光

Polished side Ra抛光面

nm

Back Side Criteria反面

µm

General is 0.2-0.5µm or as customized

Appearance外观

Contamination污染

None

Particles微粒 >0.3µm

<=30

Saw Marks, striations锯痕，条纹

None

Scratch划痕

None

Cracks, crowsfeel saw marks, stains裂纹

None