Lithium Niobate Wafer
Lithium Niobate has good nonlinear optical properties and can be used as optical waveguide material, or to produce medium and low frequency SAW filter, high power high temperature resistant ultrasonic transducer, etc. Lithium niobate doping is now widely used, such as Mg:LN, Nd:Mg:LN, Fe:LN.
材料特性 Material Characteristics
Material材料 |
3" 4" 6" 8" LN wafer Saw/Optical grade 铌酸锂晶片(声表级/光学级) |
Orientation切型 |
X/Z/Y41°/Y64°/Y128°/YZ/YX or Customized 可定制 |
Curie Temp居里温度 |
1142°C±3°C |
Doped with掺杂 |
Zn, MgO single or double doped available |
加工能力 processing capacity
Surface finish表面处理 |
single or double sides polish (DLP/SLP/ SSP/DSP all available ) |
|
Thickness厚度 |
||
TTV |
< 1~5µm |
|
BOW |
± (25µm ~40um ) |
|
Warp |
<= 35µm |
|
LTV (5mmx5mm) |
<1.5 um |
|
PLTV(<0.5um) |
≥98% (5mm*5mm) with 2mm edge excluded |
|
Edge边缘 |
Compl't with SEMI M1.2 with GC800# .regular at C typed |
|
Orientation flats定向平台 |
available, per request |
|
Polished side Ra抛光面 |
Roughness Ra<=5A |
|
Back Side Criteria反面 |
Roughness Ra:0.5-1.0µm GC#1000 |
|
Edge Rounding |
Compliant with SEMI M1.2 Standard/refer to IEC62276 |
|
Cracks, saw marks, stains |
None |
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