.

Lithium Niobate Wafer

Lithium Niobate has good nonlinear optical properties and can be used as optical waveguide material, or to produce medium and low frequency SAW filter, high power high temperature resistant ultrasonic transducer, etc. Lithium niobate doping is now widely used, such as Mg:LN, Nd:Mg:LN, Fe:LN.

材料特性 Material Characteristics

Material材料

3" 4" 6" 8" LN wafer Saw/Optical grade 铌酸锂晶片(声表级/光学级)

Orientation切型

X/Z/Y41°/Y64°/Y128°/YZ/YX or Customized 可定制

Curie Temp居里温度

1142°C±3°C

Doped with掺杂

Zn, MgO single or double doped available

加工能力 processing capacity

Surface finish表面处理

single or double sides polish (DLP/SLP/ SSP/DSP all available )

Thickness厚度

TTV

< 1~5µm

BOW

± (25µm ~40um )

Warp

<= 35µm

LTV (5mmx5mm)

<1.5 um

PLTV(<0.5um)

≥98% (5mm*5mm) with 2mm edge excluded

Edge边缘

Compl't with SEMI M1.2 with GC800# .regular at C typed

Orientation flats定向平台

available, per request

Polished side Ra抛光面

Roughness Ra<=5A

Back Side Criteria反面

Roughness Ra:0.5-1.0µm GC#1000

Edge Rounding

Compliant with SEMI M1.2 Standard/refer to IEC62276

Cracks, saw marks, stains

None



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